Title :
Undercut silicon optical waveguide fabricated on bulk Si
Author :
Yan, Hung-Jung ; Shie, Jia-Rung ; Wu, Tsu-Hsiu ; Chiu, Yi-Jen
Author_Institution :
Dept. of Photonics, Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
Abstract :
A novel Si-based optical waveguide, namely undercut Si waveguide (USW), based on bulk-Si has been demonstrated. A strong Fabry-Perot oscillation (loss=2.89 dB/cm) in optical transmission is obtained, confirming optical confinement of USW.
Keywords :
integrated optics; optical waveguides; silicon; Si; optical confinement; optical transmission; strong Fabry-Perot oscillation; undercut silicon optical waveguide; Optical device fabrication; Optical scattering; Optical sensors; Optical signal processing; Optical waveguides; Silicon;
Conference_Titel :
OptoElectronics and Communications Conference (OECC), 2010 15th
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-6785-3
