Title : 
All-silicon and in-line integration of a variable optical attenuator and photodetector
         
        
            Author : 
Park, Sungbong ; Yamada, Koji ; Tsuchizawa, Tai ; Watanabe, Toshifumi ; Nishi, Hidetaka ; Shinojima, Hiroyuki ; Itabashi, Sei-ichi
         
        
            Author_Institution : 
NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
         
        
        
        
        
        
            Abstract : 
We demonstrate in-line integration of a variable optical attenuator (VOA) and a photodetector (PD) based on a submicrometer silicon rib waveguide for 1550 nm. These devices are lateral p-i-n diodes. The VOA works in basis of free carrier absorption by carrier injection, while the PD utilizes defect-level-mediated photon absorption. We present characterizations of the PD and synchronous operation of those devices.
         
        
            Keywords : 
optical attenuators; p-i-n diodes; photodetectors; all-silicon; carrier injection; defect-level-mediated photon absorption; free carrier absorption; in-line integration; p-i-n diodes; photodetector; submicrometer silicon rib waveguide; synchronous operation; variable optical attenuator; wavelength 1550 nm; Absorption; Bandwidth; Optical attenuators; Optical device fabrication; Optical waveguides; Photonics; Silicon;
         
        
        
        
            Conference_Titel : 
OptoElectronics and Communications Conference (OECC), 2010 15th
         
        
            Conference_Location : 
Sapporo
         
        
            Print_ISBN : 
978-1-4244-6785-3