Title :
Evaluation of stroke and force of enlargement mechanism
Author :
Morimoto, Yoshitaka ; Okada, Suguru
Author_Institution :
Dept. of Mech. Eng., Kanazawa Inst. of, Ishikawa, Japan
Abstract :
A new positioning device driven by an enlargement mechanism with a PZT drive has been developed to realize positioning the table by submicron meter. In this study, the mechanical principal of a newly developed enlargement mechanism consisting of fluid chamber, a PZT device, and cutting tool stage is reported. The basic performances of the developed mechanism are also evaluated. This developed device demonstrates that the magnitude of enlargement reaches 4 times of stroke than the original one of the PZT. The dynamic characteristics show DC to 5 Hz which is enough wide for the frequency response to realize the precise positioning. The positioning stage is controlled by PI control. The positioning accuracy is accurate enough for the precise positioning.
Keywords :
PI control; cutting; cutting tools; drives; force control; position control; PI control; PZT drive; cutting tool stage; enlargement mechanism; fluid chamber; force evaluation; mechanical principal; positioning stage; stroke evaluation; submicron meter; Bellows; Displacement measurement; Force; Frequency response; Performance evaluation; Position measurement; Voltage measurement; Enlargement mechanism; Non-circle cutting; PZT; Positioning accuracy; Thrust force;
Conference_Titel :
SICE Annual Conference 2010, Proceedings of
Conference_Location :
Taipei
Print_ISBN :
978-1-4244-7642-8
