Fast positioning using N4SID model referenced predictive anti-phase pitch driving vibration suppression control

Vibration suppression control considering elastic part deformation is one of the indispensable issues in the precision engineering field and a high-density LSI circuit processing. This study aims at suppressing the induced vibration at rapid positioning operation using the N4SID (Numerical algorithms for Subspace State Space model Identification) Model Referenced Predictive Repeated Word Anti-phase pitch Driving. This control method consists of reduced order model identification and Predictive Repeated Word control using the anti-phase pitch driving based on an estimated behavior of the identified model. This method was applied to principal axis vibration suppression of three axes positioning machine driven by a ball screw feeding mechanism to control the probe tip end positioning in feeding rod axis. The result showed that effective performance in residual vibration error attenuation within 15% of non-controlled.