• DocumentCode
    531625
  • Title

    Power handling of temperature-stable thin-film RF MEMS capacitive switches

  • Author

    Mahameed, Rashed ; Rebeiz, Gabriel M.

  • Author_Institution
    Electr. & Comput. Eng. Dept., Univ. of California at San Diego, La Jolla, CA, USA
  • fYear
    2010
  • fDate
    28-30 Sept. 2010
  • Firstpage
    97
  • Lastpage
    100
  • Abstract
    This work presents the power handling analysis and measurements of a temperature-stable thin film RF MEMS capacitive switch. The switch demonstrates a very low sensitivity to temperature with a pull-down voltage variation of <;50 mV/°C. Power handling simulations and measurements are also presented up to 1.3 W.
  • Keywords
    microswitches; microwave switches; thin film devices; power handling measurement; power handling simulation; pull-down voltage variation; temperature-stable thin-film RF MEMS capacitive switch;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference (EuMC), 2010 European
  • Conference_Location
    Paris
  • Print_ISBN
    978-1-4244-7232-1
  • Type

    conf

  • Filename
    5616589
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=531625