Title :
Power handling of temperature-stable thin-film RF MEMS capacitive switches
Author :
Mahameed, Rashed ; Rebeiz, Gabriel M.
Author_Institution :
Electr. & Comput. Eng. Dept., Univ. of California at San Diego, La Jolla, CA, USA
Abstract :
This work presents the power handling analysis and measurements of a temperature-stable thin film RF MEMS capacitive switch. The switch demonstrates a very low sensitivity to temperature with a pull-down voltage variation of <;50 mV/°C. Power handling simulations and measurements are also presented up to 1.3 W.
Keywords :
microswitches; microwave switches; thin film devices; power handling measurement; power handling simulation; pull-down voltage variation; temperature-stable thin-film RF MEMS capacitive switch;
Conference_Titel :
Microwave Conference (EuMC), 2010 European
Conference_Location :
Paris
Print_ISBN :
978-1-4244-7232-1
