DocumentCode
531785
Title
Impact of the electrodes on the tunability of paraelectric BST film based FBARs
Author
Gevorgian, S. ; Vorobiev, A.
Author_Institution
Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Gothenburg, Sweden
fYear
2010
fDate
28-30 Sept. 2010
Firstpage
1210
Lastpage
1213
Abstract
It is shown that tunability of the paraelectric film based FBARs is substantially suppressed by the electrodes. Electrodes with higher impedance “push” the acoustic field from non-tunable electrodes into tunable ferroelectric film thereby increase the tuning of the resonant frequency and effective coupling coefficient.
Keywords
acoustic field; acoustic resonators; barium compounds; bulk acoustic wave devices; electric impedance; electrodes; electromagnetic coupling; ferroelectric materials; acoustic field; coupling coefficient; film bulk acoustic resonator; impedance; nontunable electrode; paraelectric BST film; resonant frequency tuning; tunability; tunable ferroelectric film; Couplings; Electrodes; Film bulk acoustic resonators; Films; Impedance; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference (EuMC), 2010 European
Conference_Location
Paris
Print_ISBN
978-1-4244-7232-1
Type
conf
Filename
5617154
Link To Document