DocumentCode
532563
Title
Notice of Retraction
Design of component simulation platform for integrated circuit manufacturing equipments
Author
Wei Wang ; Bo Li ; Hua Xu ; Lei Li ; Peifa Jia ; Longqing Zou
Author_Institution
Coll. of Electron. Eng., Chongqing Univ. of Posts & Telecommun., Chongqing, China
Volume
7
fYear
2010
fDate
22-24 Oct. 2010
Abstract
Notice of Retraction
After careful and considered review of the content of this paper by a duly constituted expert committee, this paper has been found to be in violation of IEEE´s Publication Principles.
We hereby retract the content of this paper. Reasonable effort should be made to remove all past references to this paper.
The presenting author of this paper has the option to appeal this decision by contacting TPII@ieee.org.
Simulation plays an important role in researching, developing and testing Integrated Circuit (IC) manufacturing equipments. It is possible to test most of the functions and performance on simulation platform, and simulation platform can be used to verify the consistency of the process and the reliability of IC manufacturing equipment at the same time. In order to achieve a class of general and configurable simulation platform, which is based on SEMI standard. This paper describes component simulation platform framework and design methodology. Equipment maintenance time could be reduced and equipment utilization could be maximized with this simulation system. As a case study, the gas deliver subsystem test simulation is investigated on the designed component simulation platform, the simulation results show that the component simulation platform is helpful for rapid installation of IC equipment and verify its functions due to the automotic configuration of the component simulation middleware.
After careful and considered review of the content of this paper by a duly constituted expert committee, this paper has been found to be in violation of IEEE´s Publication Principles.
We hereby retract the content of this paper. Reasonable effort should be made to remove all past references to this paper.
The presenting author of this paper has the option to appeal this decision by contacting TPII@ieee.org.
Simulation plays an important role in researching, developing and testing Integrated Circuit (IC) manufacturing equipments. It is possible to test most of the functions and performance on simulation platform, and simulation platform can be used to verify the consistency of the process and the reliability of IC manufacturing equipment at the same time. In order to achieve a class of general and configurable simulation platform, which is based on SEMI standard. This paper describes component simulation platform framework and design methodology. Equipment maintenance time could be reduced and equipment utilization could be maximized with this simulation system. As a case study, the gas deliver subsystem test simulation is investigated on the designed component simulation platform, the simulation results show that the component simulation platform is helpful for rapid installation of IC equipment and verify its functions due to the automotic configuration of the component simulation middleware.
Keywords
CAD; digital simulation; integrated circuit manufacture; middleware; production engineering computing; production equipment; semiconductor industry; IC manufacturing equipment; SEMI standard; Semiconductor Equipment and Materials International standards; component simulation middleware; component simulation platform design; equipment maintenance time; equipment utilization; gas deliver subsystem test simulation; integrated circuit manufacturing equipments; Clocks; IP networks; Load modeling; Middleware; Process control; IC manufacturing equipment; Pressure subsystem; SEMI standard;
fLanguage
English
Publisher
ieee
Conference_Titel
Computer Application and System Modeling (ICCASM), 2010 International Conference on
Conference_Location
Taiyuan
Print_ISBN
978-1-4244-7235-2
Type
conf
DOI
10.1109/ICCASM.2010.5620753
Filename
5620753
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