Title :
Analysis of dynamic effects of charge injection due to ESD in MEMS
Author :
Greason, William D.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Western Ontario, London, ON, Canada
Abstract :
A model is developed to analyze the effect of a leaky dielectric layer and air gap space charge on the frequency response of a capacitive MEMS structure. A straight line approximation technique is employed to estimate the transfer function for various input variables. Conditions for a no operation mode are assessed.
Keywords :
air gaps; approximation theory; electrostatic discharge; frequency response; micromechanical devices; space charge; transfer functions; ESD; air gap space charge; capacitive MEMS structure; charge injection; dynamic effect analysis; frequency response; leaky dielectric layer; straight line approximation technique; transfer function; Dielectrics; Electrostatic discharge; Frequency control; Micromechanical devices; Space charge; Switches; Voltage control;
Conference_Titel :
Electrical Overstress/ Electrostatic Discharge Symposium (EOS/ESD), 2010 32nd
Conference_Location :
Reno, NV
Print_ISBN :
978-1-58537-182-2
Electronic_ISBN :
978-1-58537-182-2
