DocumentCode
533394
Title
Analysis of dynamic effects of charge injection due to ESD in MEMS
Author
Greason, William D.
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Western Ontario, London, ON, Canada
fYear
2010
fDate
3-8 Oct. 2010
Firstpage
1
Lastpage
8
Abstract
A model is developed to analyze the effect of a leaky dielectric layer and air gap space charge on the frequency response of a capacitive MEMS structure. A straight line approximation technique is employed to estimate the transfer function for various input variables. Conditions for a no operation mode are assessed.
Keywords
air gaps; approximation theory; electrostatic discharge; frequency response; micromechanical devices; space charge; transfer functions; ESD; air gap space charge; capacitive MEMS structure; charge injection; dynamic effect analysis; frequency response; leaky dielectric layer; straight line approximation technique; transfer function; Dielectrics; Electrostatic discharge; Frequency control; Micromechanical devices; Space charge; Switches; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/ Electrostatic Discharge Symposium (EOS/ESD), 2010 32nd
Conference_Location
Reno, NV
Print_ISBN
978-1-58537-182-2
Electronic_ISBN
978-1-58537-182-2
Type
conf
Filename
5623765
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