Title :
Microwave module for noncontact measurement of semiconductors
Author :
Vladimirov, V.M. ; Konnov, V.G. ; Markov, V.V. ; Martynovskiy, V.N. ; Repin, N.S. ; Shepov, V.N.
Author_Institution :
Krasnoyarsk Sci. Centre, SB RAS, Krasnoyarsk, Russia
Abstract :
Controlled microwave module for sensing of semiconductors is developed. The results of its application for measurement of minority-carrier lifetime in silicon are presented.
Keywords :
carrier lifetime; elemental semiconductors; microwave measurement; minority carriers; silicon; Si; controlled microwave module; minority-carrier lifetime; semiconductor noncontact measurement; silicon; Microwave amplifiers; Microwave circuits; Microwave communication; Microwave filters; Microwave integrated circuits; Microwave measurements;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-7184-3
DOI :
10.1109/CRMICO.2010.5631197
