Title :
Measurement accuracy increase for nanodimensional systems parameters in near-field microwave microscopes
Author :
Sorokin, A.N. ; Filatov, Yu.A.
Author_Institution :
Balashov Inst., Saratov State Univ., Balashov, Russia
Abstract :
The new approached method of reflection factor calculation for near-field microwave microscope is offered, it allows raising measurement accuracy of nanodimensional systems parameters.
Keywords :
microscopes; microwave devices; nanotechnology; near-field scanning optical microscopy; measurement accuracy; nanodimensional systems parameters; near-field microwave microscopes; reflection factor calculation; Accuracy; Microwave measurements; Microwave theory and techniques; Nanoscale devices; Reflection; Scanning probe microscopy;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-7184-3
DOI :
10.1109/CRMICO.2010.5632568
