Title :
The basic aspects of the general theory of scanning microwave microscopy
Author :
Gordienko, Yu.Ye. ; Larkin, Yu S.
Author_Institution :
Kharkov Nat. Univ. of Radioelectron., Kharkov, Ukraine
Abstract :
The numerical modeling of electrodynamics of interaction of the coaxial resonator microprobe with dielectric and semiconductor objects allowed ascertaining some dependence of signal parameters of primary transformation of the information on the geometry of probe aperture and electrophysical parameters of an object. Numerical-analytical and experimental research after detector transformation of signals have determined a general theoretical aspects of various ways of this stage of signal forming. The preconditions of forming of the general theory of SMM are created.
Keywords :
electrodynamics; electron probe analysis; geometry; scanning electron microscopy; SMM general theory; coaxial resonator microprobe; dielectric objects; electrodynamics; numerical modeling; scanning microwave microscopy; semiconductor objects; Apertures; Microscopy; Microwave imaging; Microwave measurements; Microwave theory and techniques; Probes; Shape;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-7184-3
DOI :
10.1109/CRMICO.2010.5632786
