Title :
The new generation of microwave near-field sensors
Author :
Gordienko, Yu Ye ; Lepikh, Ya I.
Author_Institution :
Kharkov Nat. Univ. of Radioelectron., Kharkov, Ukraine
Abstract :
The article represents results of investigations and development of new principles of functioning and construction concerning microwave sensors of various physical parameters of materials and objects which have carried out for improvement its metrological characteristics and increasing the sensitivity and localization precision, for the range expansion of controlling parameters and for increasing a number of controlling parameters.
Keywords :
microwave materials; microwave measurement; controlling parameters; localization precision; metrological characteristics; microwave near-field sensors; Microscopy; Microwave sensors; Semiconductor device measurement; Sensitivity; Sensor systems;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-7184-3
DOI :
10.1109/CRMICO.2010.5632797