DocumentCode
534020
Title
Investigation of variants of power supply schemes for microwave magnetron average power for plasma processing of materials
Author
Madveyko, S.I.
Author_Institution
Belarusian State Univ. of Inf. & Radioelectron., Minsk, Belarus
fYear
2010
fDate
13-17 Sept. 2010
Firstpage
1099
Lastpage
1100
Abstract
The results of experimental research of plasma radiation optical signal depending on the pressure in the plasmatron chamber, using the different electrical networks of microwave magnetron power supply, are presented.
Keywords
magnetrons; microwave power transmission; optical signal detection; plasma diodes; plasma materials processing; electrical network; microwave magnetron average power; microwave magnetron power supply; plasma processing; plasma radiation optical signal; plasmatron chamber; Luminescence; Optical pulses; Optical saturation; Plasmas; Power supplies; Saturation magnetization;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology (CriMiCo), 2010 20th International Crimean Conference
Conference_Location
Sevastopol
Print_ISBN
978-1-4244-7184-3
Type
conf
DOI
10.1109/CRMICO.2010.5632840
Filename
5632840
Link To Document