A scheduling method in semiconductor manufacturing lines based on genetic algorithm and simulated annealing algorithm

Author

Tang Chun-hui ; Yu-Liang, Qian ; Jun, Zhu ; Shu-jia, Yan

Author_Institution

Sch. of Opt.-Electr. & Comput. Eng., Univ. of Shanghai for Sci. & Technol., Shanghai, China

Volume

1

fYear

2010

fDate

18-19 Oct. 2010

Abstract

Semiconductor manufacturing is one of the most complex manufacturing process. And job scheduling is a major problem in the semiconductor operation. A method of job scheduling in semiconductor manufacturing lines is proposed based on genetic algorithm and simulated annealing algorithm. Firstly each job is given a set of machine processing set* based on genetic algorithm, then the processing sequence of each machine can be arranged based on simulated annealing. This paper presents the reason and the solution in detail. The Minifab model is solved by the method and the result proves that this method is effective.

Keywords

genetic algorithms; manufacturing systems; scheduling; semiconductor device manufacture; simulated annealing; genetic algorithm; job scheduling; machine processing set; minifab model; semiconductor manufacturing line; simulated annealing algorithm; Annealing; genetic algorithm; minifab model; semiconductor manufacturing; simulated annealing algorithm; workpiece scheduling;

fLanguage

English

Publisher

ieee

Conference_Titel

Information Networking and Automation (ICINA), 2010 International Conference on

Conference_Location

Kunming

Print_ISBN

978-1-4244-8104-0

Electronic_ISBN

978-1-4244-8106-4

Type

conf

DOI

10.1109/ICINA.2010.5636524

Filename

5636524