DocumentCode :
535350
Title :
Surface-cleanliness inspection apparatus for optical component based on machine vision
Author :
Chu, Hongyu ; Xie, Zhijiang ; Liu, Qin ; Shao, Yanhua ; Mi, Zengzhen
Author_Institution :
State Key Lab. of Mech. Transm., Chongqing Univ., Chongqing, China
Volume :
4
fYear :
2010
fDate :
16-18 Oct. 2010
Firstpage :
1694
Lastpage :
1698
Abstract :
In high-power laser systems, such as NIF and SG-III, the contamination existing on the optical surfaces will reduce the performance of load and even lead damage to optical components. It is important to acquire the cleanliness level for obtaining ideal functionality. The existing methods are usually low efficiency or low accuracy or high cost in inspection process. A new inspection system based on machine vision has been introduced in this paper. We design three-dimensional control platform and clamp, choosing step motors and grating to implement high-precision control, using linear CCD with pixel 10μm*10μm as the image acquisition, adopting halogen lamp as light source and employing image processing technology to gain the characteristic parameters. Through the calibration experiments, the detection error is within ± 10%. Experiment of optical element with size 400mm*400mm shows that, the apparatus can complete the single face scan and analysis in 16 minutes. It can greatly improve the examine efficiency.
Keywords :
automatic optical inspection; computer vision; computerised instrumentation; laser accessories; optical elements; optical engineering computing; optical testing; surface contamination; NIF; SG-III; calibration experiments; detection error; face scan; halogen lamp; high-power laser systems; high-precision control; image acquisition; image processing technology; inspection process; light source; linear CCD; machine vision; optical component damage; optical element; optical surface contamination; step motors; surface-cleanliness inspection apparatus; three-dimensional control platform; Cameras; Charge coupled devices; Image processing; Optical imaging; Optical surface waves; Surface contamination; Surface treatment; Cleanliness Inspection; Machine Vision; Optical Component;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Image and Signal Processing (CISP), 2010 3rd International Congress on
Conference_Location :
Yantai
Print_ISBN :
978-1-4244-6513-2
Type :
conf
DOI :
10.1109/CISP.2010.5647763
Filename :
5647763
Link To Document :
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