Title :
The Research of Disk Abrade Uniformity for the Double-Side Lapping
Author :
Zhang, Xinming ; Cui, Lianzhu ; Liu, Jianhe
Author_Institution :
Changchun Univ. of Sci. & Technol., Changchun, China
Abstract :
After the establishing of lapping trace equation with planet mechanism, based on the simulated trace distribution state, the problems about the lapping trace density were analyzed, and the machining parameters were chosen by the method of numeric calculation, then the objective of lapping the work-piece such as: silicon slice, thin glass sheet etc. uniformly and with high speed can be obtained.
Keywords :
discs (structures); lapping (machining); disk abrade uniformity; double-side lapping; lapping trace density; lapping trace equation; machining parameter; numeric calculation; planet mechanism; silicon slice; thin glass sheet; trace distribution state; Equations; Gears; Lapping; Mathematical model; Planets; Silicon;
Conference_Titel :
E-Product E-Service and E-Entertainment (ICEEE), 2010 International Conference on
Conference_Location :
Henan
Print_ISBN :
978-1-4244-7159-1
DOI :
10.1109/ICEEE.2010.5661119
