A fuzzy logic-based and hybrid dispatching policy for interbay material handling system in 300mm semiconductor manufacturing system

To obtain better comprehensive performances of the interbay material handling systems and 300mm semiconductor manufacturing systems (SMSs), a novel fuzzy logical-based and hybrid (FLH) dispatching policy is proposed, in which the system parameters including vehicle´s distance, lot´s due date, lot´s waiting time and lot´s critical feature parameter are considered simultaneously, and the weight coefficients of these system parameters are adjusted adaptively by Takagi-Sugeno fuzzy logic method. With experimental data from an interbay system of 300mm SMSs, it is demonstrated that the proposed approach has better comprehensive performances when compare with conventional dispatching methodologies.