DocumentCode
539353
Title
Message from ISSM 2008 Executive Committee chair
Author
Inoue, Michihiro
Author_Institution
Semiconductor Company, Panasonic Corporation, Japan
fYear
2008
fDate
27-29 Oct. 2008
Abstract
On behalf of the International Symposium on Semiconductor Manufacturing (ISSM) 2008 Executive Committee, it is a great pleasure and honor for us to have you at the seventeenth annual ISSM.
Keywords
Companies; Executive Committee; Industries; Lithography; Production facilities;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location
Tokyo, Japan
ISSN
1523-553X
Electronic_ISBN
1523-553X
Type
conf
Filename
5714870
Link To Document