Fully automation control system for golden super hot lot in 300mm Fab

This paper purpose is for the highest priority super hot lot (golden lot) to reduce its cycle time. We develop the system called as advanced golden super hot lot management system. This system is already implemented in the REXCHIP 300mm Fab. The purpose of project is to use automated method to shorten lot cycle time to verify the process and speed up product pilot run period. After fully automation control system implemented in our 300mm Fab, our project got good results. The golden lot average output cycle time from 30 days to 16 days. The cycle time reduced about 47%. The benefits of the project are that decrease the influence to the bottleneck tool lowest and the process´s verification become more speed.