DocumentCode
539376
Title
Multiple lot in one FOUP(MLiF) control and management in the 300mm Fab
Author
Chan, Nian-Wei ; Lo, Hsi-Lo ; Pan, Cheng-Chung
Author_Institution
Rexchip Semiconductor Corp., NO.429-1, SANFONG RD., HOULI TOWNSHIP, TAICHUNG COUNTY, CENTRAL TAIWAN SCIENCE PARK, TAIWAN, R.O.C.
fYear
2008
fDate
27-29 Oct. 2008
Firstpage
103
Lastpage
106
Abstract
One of the critical challenges in today´s Fab operation is to reduce operation cost. About 5% ∼ 10% in Fab WIP belong to “Small Lot” which lot quantities less than 25 pieces. Tool trouble or engineering experimentation was the major cause. These lots caused long cycle time, high production cost. Traditionally, operator manual collect “small lot” by standalone sorter. It is inefficiency. For improving above issues, we built up Multi-Lot in one FOUP (MLiF) management system. After implementation, small lot cycle time improved 15%, cost saving USD 2.53 million/year.
Keywords
Batch production systems; Control systems; Dispatching; IEEE Press; Loading; Monitoring; APC; Small lot; Sorter; operation cost; real time dispatcher;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location
Tokyo, Japan
ISSN
1523-553X
Electronic_ISBN
1523-553X
Type
conf
Filename
5714897
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