Title :
Manual Material Handling System
Author :
Chen, Wen Cheng ; Chiou, Noah ; Lu, J.Y. ; Yeh, Jonathan ; Kuan, Jessica
Author_Institution :
Taiwan Semiconductor Manufacturing Company, Ltd., 9, Creation Rd. 1, Hsinchu Science Park, Taiwan 300-77, R.O.C.
Abstract :
In the semiconductor manufacturing industry, wafers are transported from machine to machine via Automatic Material Handling System (AMHS) without human intervention in a 12-inch fabrication (fab) plant. However, wafers are transported by men in 8-inch fab. Transportation by men is both time consuming and inefficient due to work cells layout and complicated routes. This paper will describe a system called Manual Material Handling System (MMHS) for transporting wafers with high efficiency and speed. After implementing the system in various 6-inch and 8-inch fabs, it has been proved to be working properly and robustly.
Keywords :
Humans; Layout; Loading; Manuals; Manufacturing; Transportation;
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location :
Tokyo, Japan
Electronic_ISBN :
1523-553X
