DocumentCode :
539382
Title :
A study of multiple objectives real-time dispatcher for wafer fabrication
Author :
Lee, Yen-Fei ; Jiang, Zhibin ; Huai, Zhang ; Ko, Chen-Pin ; Zambri, Mohamad ; Yi, Deer ; Kumar, Asok
Author_Institution :
SilTerra Malaysia Sdn Bhd, Kulim, Kedah, Malaysia
fYear :
2008
fDate :
27-29 Oct. 2008
Firstpage :
163
Lastpage :
166
Abstract :
This paper proposes a FUZZY-based approach to solve three main issues on multiple-objectives real-time dispatcher development for wafer fabrication. The first one is determining proper priority index for each lot. The second one is providing methods for setting stage move targets. The third oneis developing practical system to perform real-time dispatcher for specific area. The study of dispatching optimization that provides positive support for related researches of production planning, scheduling, dispatching and control in the semiconductor manufacturing field.
Keywords :
Dispatching; Fabrication; Indexes; Job shop scheduling; Real time systems; Semiconductor device modeling;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location :
Tokyo, Japan
ISSN :
1523-553X
Electronic_ISBN :
1523-553X
Type :
conf
Filename :
5714903
Link To Document :
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