FDC-methods as trigger for predective maintenance for hot- and wet-process equipment

In high volume production a key performance-indicator is the highest possible uptime of process equipment. This may be achieved by moving from time-triggered “preventinve” to event-triggered “predictive” maintenance, which has become a topic in the industry in the past years. This paper gives examples on events that can be used as triggers for maintenance actions. Performing FDC (Fault Detection and Classification) methods on trace-data and on event-logs collected from the equipment helped to identify these triggers. Furthermore, the FDC system may be used for recipe optimization and tool-matching.