DocumentCode
539429
Title
A novel filter rating method for less than 30 nm particle
Author
Mizuno, Takehito ; Namiki, Akihisa ; Tsuzuki, Shuichi ; Numaguchi, Toru
Author_Institution
Nihon Pall Ltd., 46, Kasuminosato, Ami-machi, Inashiki-gun, Ibaraki 300-0315 Japan
fYear
2008
fDate
27-29 Oct. 2008
Firstpage
361
Lastpage
364
Abstract
This paper describes a novel filter rating method beyond the current 30 nm limit by combining dynamic light scattering (DLS) and ICP-MS technique, and proposes the usage of gold nanoparticle as the standard challenge particle. Furthermore, the effect of protective ligand addition was investigated in order to decrease the adsorbing effect between gold nanoparticle and membrane surface.
Keywords
Atmospheric measurements; Biomembranes; Erbium; Gold; Nanoparticles; Particle measurements; Size measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location
Tokyo, Japan
ISSN
1523-553X
Electronic_ISBN
1523-553X
Type
conf
Filename
5714951
Link To Document