Detection of non visible Poly leakage defect by e-beam inspection

E-beam inspection (EBI) was used on a Poly Voltage Contrast (PVC) structure to detect a non-visible Poly to Poly leakage defect on production wafers. The Voltage Contrast signature that EBI detected strongly correlated with electrical leakage test result. e-beam inspection on Poly Voltage Contrast structure significantly reduces the time for the defect root cause analysis.