Title :
A trend mining method for yield improvement based on trend in time series
Author :
Tsuda, Hidetaka ; Shirai, Hidehiro ; Terabe, Masahiro ; Hashimoto, Kazuo ; Shinohara, Ayumi
Author_Institution :
Fujitsu LSI Technology Limited, KSP R&D 3-2-1 Sakado, Takatsuku Kawasaki 213-0012, JAPAN
Abstract :
We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.
Keywords :
Data analysis; Data mining; Feature extraction; Fluctuations; Manufacturing; Regression tree analysis; Time series analysis;
Conference_Titel :
Semiconductor Manufacturing (ISSM), 2008 International Symposium on
Conference_Location :
Tokyo, Japan
Electronic_ISBN :
1523-553X
