• DocumentCode
    539450
  • Title

    Message from ISSM 2008 Japan Program Committee chair

  • Author

    Otsuka, Nobuhiro

  • Author_Institution
    ISSM 2008, Japan Program Committee Chair, Hitachi, Ltd., Japan
  • fYear
    2008
  • fDate
    27-29 Oct. 2008
  • Abstract
    On behalf of the ISSM2008 Program Committee, I would like to thank all of you for your participation to this symposium.
  • Keywords
    Abstracts; Heart; Industries; Lead; Manufacturing; Speech; Tutorials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing (ISSM), 2008 International Symposium on
  • Conference_Location
    Tokyo, Japan
  • ISSN
    1523-553X
  • Electronic_ISBN
    1523-553X
  • Type

    conf

  • Filename
    5714972