A Reduced-order Model for Microbeam-based Magnetic Actuators

A reduced-order model for microbeam-based magnetic actuators has been presented based on using the linear mode shapes of a microbeam as basis functions. In comparison with previous models, the present model accounts for the micro-magnetic-core reluctance and the coupling between the beam deflection and magnetic force. The integration for magnetic force is calculated by dividing the microbeam into several segments, and the nonlinear equation set has been developed based on the magnetic circuit principle. The model has been validated by comparing its results with experimental results available in the literature and finite-element solutions. The model also shows that using the linear mode shapes of a microbeam as basis functions has enough accuracy for small deflection. The number of integration segments M has almost no effect to the calculation results because the microbeam deflection curve is nearly a straight line in small deflection situation.