On-wafer mm-wave V-band semi-automatic power measurement system

This paper proposes an on-wafer mm-wave V-band semi-automatic power measurement system (OMVSPMS) with some external passive attenuators (ATT) for mm-wave circuits and presents the calibration and measurement method programmed by standard commands for programmable instruments (SCPI) language with Agilent VEE software. Since accurate measurement results are desirable, for example, the 1-dB compression point (P_1dB) and the input third order intercept point (IP3) are items of linearity for mm-wave active circuits. Both also need right power into device under test (DUT) to expect right P_1dB and IP3. Therefore, an implementation of calibration and measurement method combined traditional mm-wave instruments with some external passive attenuators is used for accurate power generation of the stimulus and accurate power reception of the receiver.