Title :
The model of MEMS analysis with the use of functional Petri Nets theory
Author :
Denysyuk, Pavlo ; Teslyuk, Vasyl
Author_Institution :
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
The presented MEMS model on the basis of functional Petri Nets for analysis of tasks at projection system level.
Keywords :
Petri nets; micromechanical devices; MEMS analysis model; functional Petri nets theory; projection system level; Analytical models; Design automation; Information processing; Information technology; Micromechanical devices; Petri nets; Solid modeling; MEMS; Petri Nets; information technology;
Conference_Titel :
CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
Conference_Location :
Polyana-Svalyava
Print_ISBN :
978-1-4577-0042-2
Electronic_ISBN :
978-966-2191-17-2
