Title :
Models and instruments of MEMS analysis with the use of inhibited Petri Nets
Author :
Teslyuk, Vasyl ; Denysyuk, Pavlo ; Zaharyuk, Roman ; Vasyliuk, Iaroslav ; Pidlypnyy, Yuri
Author_Institution :
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
The developed model for analysis of MEMS structures based on inhibited Petri Nets is presented. Results of analysis are presented. Approaches to development of software for information technology of MEMS analysis and synthesis are offered.
Keywords :
Petri nets; electronic engineering computing; information technology; micromechanical devices; software engineering; MEMS analysis; MEMS structure; MEMS synthesis; information technology; inhibited Petri net; microelectromechanical system; software development; Analytical models; Biological system modeling; Mathematical model; Micromechanical devices; Object oriented modeling; Petri nets; Solid modeling; MEMS; Petri Nets; information technology;
Conference_Titel :
CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
Conference_Location :
Polyana-Svalyava
Print_ISBN :
978-1-4577-0042-2
Electronic_ISBN :
978-966-2191-17-2
