DocumentCode :
54448
Title :
Nano scale, mega scope
Volume :
50
Issue :
7
fYear :
2014
fDate :
March 27 2014
Firstpage :
480
Lastpage :
480
Abstract :
A common type of multi-layer ceramic capacitor displays very good, almost hysteresis-free characteristics as a micro-actuator. The industrial grade MLCCs tested could be of interest in applications including nanopositioning for scanning probe microscopes.
Keywords :
ceramic capacitors; hysteresis; microactuators; nanopositioning; scanning probe microscopy; hybrid circuit component; hysteresis-free characteristics; microactuator; multilayer ceramic capacitor; nanopositioning; nanotechnology; scanning probe microscopes;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el.2014.0898
Filename :
6780212
Link To Document :
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