Title :
Sodium Titanate Nanorod Moisture Sensor and Its Sensing Mechanism
Author :
Yupeng Zhang ; Ying Zhang ; Bo Fu ; Wei Li ; Wenbin Guo ; Shengping Ruan ; Dali Liu ; Yu Chen
Author_Institution :
State Key Lab. on Integrated Optoelectron., Jilin Univ., Changchun, China
Abstract :
Sodium titanate Na2Ti6O13 nanorods were synthesized by a hydrothermal method and characterized by X-ray diffraction and scanning electron microscopy. Then, the material was coated on a Al2O3 ceramic substrate to fabricate humidity sensors using Ag-Pd as interdigitated electrodes. The sensor shows high humidity sensitivity and fast response and recovery. The impedance changes by five orders of magnitude over a relative humidity (RH) range from 11% to 95%. At the frequency of 100 Hz, response and recovery times are both <;2 s, and the maximum hysteresis is <;3% RH. In addition, the complex impedance at different RH was investigated to understand the sensing mechanism. The results indicate potential applications of sodium titanate for fabricating high-performance humidity sensors.
Keywords :
X-ray diffraction; electrodes; humidity sensors; moisture; nanofabrication; nanorods; palladium; scanning electron microscopy; silver; Ag-Pd; Al2O3; Na2Ti6O13; X-ray diffraction; ceramic substrate; complex impedance; fast response and recovery; frequency 100 Hz; humidity sensitivity; humidity sensors; hydrothermal method; hysteresis; interdigitated electrodes; moisture sensor; relative humidity; scanning electron microscopy; sensing mechanism; sodium titanate nanorod; Humidity; Impedance; Materials; Nanowires; Sensors; Titanium compounds; Complex impedance; humidity sensor; response and recovery; sodium titanate;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2013.2282832
