Development of solid-based modeling system for surface micromachined MEMS

Although a lot of CAD systems and tools have developed for MEMS, there does not appear to be a means for solid-based modeling. In this paper, a modeling system based on three-dimensional solid model for surface micromachined devices is developed. The system consists of three main modules: fast process simulation and material-based process simulation; automatic mask synthesis based on solid model; collaborative modeling to support design refinement. Based on a solid modeling core ACIS, the system is implemented in VC++ and some test results are given. The system helps MEMS designers work in a more intuitive mode.