Title :
Analysis of response characteristic of a novel MEMS inertial sensor by Matlab
Author :
Linxi, Dong ; Shouluo, LI ; Baoqing, Liu ; Wei, Wang ; Haixia, Yan
Abstract :
In this paper the closed-loop model of a novel MEMS inertial sensor with the actuators drived by Lorentz force for increasing the initial sensing capacitance is established and the simulations are finished by using Matlab/Simulink. By comparing the different results between the open-loop and closed-loop, the performance of the sensor is analyzed. The results show that in closed-loop state, when the resonant frequency is 1173 Hz, the linearity range of the sensor is within -10g ~10g, which is almost twice over the situation in open-loop state. The bandwidth frequency is also up to 2865 Hz and the stability has been improved dramatically.
Keywords :
actuators; capacitance; microsensors; Lorentz force; MEMS inertial sensor; Matlab; actuators; closed loop model; frequency 1173 Hz; initial sensing capacitance; open-loop state; Capacitance; Mathematical model; Micromechanical devices; Real time systems; Resonant frequency; Sensors; Stability analysis; Capacitive sensor; Closed-loop; Deep RIE; Inertial sensor;
Conference_Titel :
Microwave Conference Proceedings (CJMW), 2011 China-Japan Joint
Conference_Location :
Hangzhou
Print_ISBN :
978-1-4577-0625-7
Electronic_ISBN :
978-7-308-08555-7
