Title :
Silicon based antennas for THz integrated arrays
Author :
Llombart, N. ; Thomas, B. ; Alonso, M. ; Lee, C. ; Chattopadhyay, G. ; Jofre, L. ; Mehdi, I.
Author_Institution :
Opt. Dept, Univ. Complutense de Madrid, Madrid, Spain
Abstract :
A set of antenna geometries for future integrated arrays at terahertz frequencies, based on two fabrication techniques is presented. The first technique consists in an advanced laser micro-fabrication, allowing fabricating advanced 3D geometries but may not be cost-efficient for large arrays. The second one is based in photolithographic processes, allowing the fabrication of arrays on a single wafer in parallel.
Keywords :
antenna arrays; elemental semiconductors; photolithography; silicon; submillimetre wave antennas; terahertz wave devices; Si; THz integrated arrays; advanced laser microfabrication; fabrication techniques; photolithographic processes; silicon based antennas; Antenna arrays; Antenna radiation patterns; Fabrication; Geometry; Horn antennas; Lenses; Silicon;
Conference_Titel :
Antennas and Propagation (EUCAP), Proceedings of the 5th European Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4577-0250-1
