DocumentCode
546491
Title
Silicon based antennas for THz integrated arrays
Author
Llombart, N. ; Thomas, B. ; Alonso, M. ; Lee, C. ; Chattopadhyay, G. ; Jofre, L. ; Mehdi, I.
Author_Institution
Opt. Dept, Univ. Complutense de Madrid, Madrid, Spain
fYear
2011
fDate
11-15 April 2011
Firstpage
3176
Lastpage
3179
Abstract
A set of antenna geometries for future integrated arrays at terahertz frequencies, based on two fabrication techniques is presented. The first technique consists in an advanced laser micro-fabrication, allowing fabricating advanced 3D geometries but may not be cost-efficient for large arrays. The second one is based in photolithographic processes, allowing the fabrication of arrays on a single wafer in parallel.
Keywords
antenna arrays; elemental semiconductors; photolithography; silicon; submillimetre wave antennas; terahertz wave devices; Si; THz integrated arrays; advanced laser microfabrication; fabrication techniques; photolithographic processes; silicon based antennas; Antenna arrays; Antenna radiation patterns; Fabrication; Geometry; Horn antennas; Lenses; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Antennas and Propagation (EUCAP), Proceedings of the 5th European Conference on
Conference_Location
Rome
Print_ISBN
978-1-4577-0250-1
Type
conf
Filename
5782257
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