Title :
High-throughput fabrication of plasmonic nanoantenna arrays using nanostencils for spectroscopy and biosensing
Author :
Aksu, Serap ; Yanik, Ahmet A. ; Adato, Ronen ; Artar, Alp ; Huang, Min ; Altug, Hatice
Author_Institution :
Dept. of Mater. Sci. & Eng., Boston Univ., Boston, MA, USA
Abstract :
We demonstrate a novel approach for high-throughput and high-resolution fabrication of engineered infrared plasmonic antenna arrays with reusable nanostencils for vibrational spectroscopy. Optical responses of these antennas are identical to ones fabricated by electron beam lithography.
Keywords :
antenna arrays; biosensors; electron beam lithography; infrared spectroscopy; masks; nanoelectromechanical devices; nanofabrication; nanopatterning; surface plasmon resonance; antenna optical response; biosensing; electron beam lithography; engineered infrared plasmonic antenna arrays; high resolution fabrication; high throughput fabrication; plasmonic nanoantenna array fabrication; reusable nanostencils; vibrational spectroscopy; Antenna arrays; Lithography; Optical device fabrication; Optical diffraction; Optical imaging; Plasmons;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
