Title :
The method of investigation of thermal portrait of integrated devices with a matrix of sensitive termistor elements
Author :
Pukach, Andrii ; Teslyuk, Vasyl ; Ivantsiv, Roman-Andriy
Author_Institution :
CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
This article describes the research method of thermal portrait of integrated devices with matrix of sensitive termistor elements.
Keywords :
micromechanical devices; thermistors; MEMS; integrated device; sensitive termistor element matrix; thermal portrait investigation; Electrical resistance measurement; Heating; Materials; Mechanical sensors; Resistance; Thermal analysis; MEMS; integrated device; termistor; thermal portrait;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2011 Proceedings of VIIth International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-1-4577-0639-4
Electronic_ISBN :
978-966-2191-18-9
