Title :
R&D of micron sized nanoionic supercapacitors for self-powered MEMS in deep-sub-voltage regime
Author :
Despotuli, Alexandr ; Andreeva, Alexandra
Author_Institution :
Inst. of Microelectron. Technol. & High Purity Mater., Instn. of the Russian Acad. of Sci., Chernogolovka, Russia
Abstract :
The development of impulse micron-sized sub-voltage supercapacitors (SCs) was initiated within the framework of a new direction, ≪nanoionics of advanced superionic conductors≫. A search for applications of nanoionic SCs was made with regard to the development of deep-sub-voltage nanoelectronics, self-powered nanosystems and related high-tech directions. New nanoionic fundamentals are introduced and the ways for the creation of advanced carbon-based nanostructures suited for different types of SCs are proposed.
Keywords :
micromechanical devices; nanoelectronics; research and development; supercapacitors; R&D; carbon-based nanostructure; deep-sub-voltage nanoelectronics; deep-sub-voltage regime; impulse micron-sized sub-voltage supercapacitor; micron sized nanoionic supercapacitor; self-powered MEMS; self-powered nanosystem; superionic conductor; Capacitors; Carbon; Conductors; Heterojunctions; Materials; Nanoelectronics; Nanoscale devices; Advanced Superionic Conductors; Carbon Nanostructures; Deep-Sub-Voltage Nanoelectronics; Nanoionic Supercapacitors; Nanoionics;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2011 Proceedings of VIIth International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-1-4577-0639-4
Electronic_ISBN :
978-966-2191-18-9
