Title :
The main properties of cantilever array of the mechanical type
Author :
Dupak, Bohdan ; Lobur, Mykhaylo
Author_Institution :
CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
In this paper describes the special manufacturing technology cantilever array of mechanical type.
Keywords :
cantilevers; micromechanical devices; MEMS industry; cantilever array manufacturing technology; mechanical type cantilever array; microelectromechanical systems; Arrays; Micromechanical devices; Probes; Silicon; Structural beams; Cantilever; MEMS; cantilever array; cantilever beams; cantilever probe; nanotechnology; tapping mode;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2011 Proceedings of VIIth International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-1-4577-0639-4
Electronic_ISBN :
978-966-2191-18-9
