Title :
The principle of “function-structure” dependency in MEMS ontology
Author :
Vasyliuk, Iaroslav ; Teslyuk, Vasyl ; Hemich, Natalya ; Zelinskyy, Andriy
Author_Institution :
CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
In the paper it is reviewed the classification of MEMS ontologies and the significance of the function-structure coupling in MEMS ontology.
Keywords :
microfabrication; micromechanical devices; ontologies (artificial intelligence); MEMS ontology; function structure dependency; Couplings; Fabrication; Frequency measurement; Materials; Micromechanical devices; Ontologies; Suspensions; MEMS; fabrication process; function-structure coupling; ontology;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2011 Proceedings of VIIth International Conference on
Conference_Location :
Polyana
Print_ISBN :
978-1-4577-0639-4
Electronic_ISBN :
978-966-2191-18-9
