Analysis of thermoelastic damping effects on flexural mode simple beam resonators

Thermoelastic Damping (TED) is a critical loss mechanism in numerous high Q micro structures and induced by the irreversible heat dissipation during the coupling of heat transfer and strain rate in an oscillating system. The magnitude of the energy loss depends on the vibrational frequency and the thermal relaxation time constant of the structure. The energy dissipation mechanism highly affects the Q factor. In this paper, the effects of TED on simple fixed-fixed type beam resonators are analyzed. Depending on the resonance frequency of different structures, different Q are obtained. The geometric effects play an important role in limiting Q factor in flexural mode resonators. The effects of material properties on the Q factor is also analyzed. Modeling and simulation of TED effects on resonators are done by using COMSOL Multiphysics software.