Title :
Topology analysis of scanning microscope images with structural entropy and discrete wavelet transform
Author :
Nagy, Szilvia ; Fehér, András
Author_Institution :
Dept. of Telecommun., Szechenyi Istvan Univ., Gyor, Hungary
Abstract :
Topology free structure of scanning electron microscopy images of heat treated, metallized compound semiconductor surfaces are studied using structural entropy based analysis. The scale dependence and the possible superstructures are determined by wavelet transforming the images before the localization type detection. The studied images are taken in-situ during a thermalization experiment, using GaAs as a substrate and gold, zinc and SiO2 layers of 60 to 100 nm thickness.
Keywords :
III-V semiconductors; discrete wavelet transforms; entropy; gallium arsenide; gold; heat treatment; image processing; metallisation; physics computing; scanning electron microscopy; silicon compounds; surface structure; topology; zinc; discrete wavelet transform; gold; heat treatment; localization type detection; metallized compound semiconductor surfaces; scale dependence; scanning electron microscopy images; scanning microscope images; size 100 nm; size 60 nm; structural entropy based analysis; superstructures; thermalization experiment; topology analysis; topology free structure; wavelet transforming; zinc; Entropy; Gallium arsenide; Pixel; Topology; Wavelet analysis; Wavelet transforms;
Conference_Titel :
Systems, Signals and Image Processing (IWSSIP), 2011 18th International Conference on
Conference_Location :
Sarajevo
Print_ISBN :
978-1-4577-0074-3
