Title :
Characterization of thin film resistors and capacitors integrated on GaAs membranes for submillimeter wave circuit applications
Author :
Zhao, Huan ; Do, Thanh Ngoc Thi ; Sobis, Peter ; Tang, Aik-Yean ; Yhland, Klas ; Stenarson, Jörgen ; Stake, Jan
Author_Institution :
Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Goteborg, Sweden
Abstract :
In this paper we describe the fabrication and characterization of thin film resistors and capacitors integrated on a 3 μm thick GaAs membrane. The thin film resistors and capacitors are based on NiCr and SiNx materials respectively. On-wafer probing DC characterization of these thin film components was performed before removing the GaAs substrate. The corresponding high frequency characterization in the WR-03 frequency band (220-325 GHz) was demonstrated utilizing a membrane-based two-port TRL calibration technique. The measurement results have shown a good agreement with the simulation.
Keywords :
capacitors; chromium alloys; membranes; millimetre wave circuits; nickel alloys; silicon compounds; submillimetre wave circuits; thin film resistors; GaAs; GaAs substrate; NiCr; SiNx; capacitors; frequency 220 GHz to 325 GHz; membranes; on-wafer probing DC characterization; size 3 mum; submillimeter wave circuit applications; thin film resistors; Capacitors; Gallium arsenide; Gold; Microwave filters; Resistors; Scattering parameters;
Conference_Titel :
Compound Semiconductor Week (CSW/IPRM), 2011 and 23rd International Conference on Indium Phosphide and Related Materials
Conference_Location :
Berlin
Print_ISBN :
978-1-4577-1753-6
Electronic_ISBN :
978-3-8007-3356-9
