DocumentCode
549690
Title
Theoretical study of the resistance switching mechanism in rutile TiO2−x for ReRAM: The role of oxygen vacancies and hydrogen impurities
Author
Park, S.G. ; Magyari-Kope, B. ; Nishi, Yoshio
Author_Institution
Dept. of Mater. Sci. & Eng., Stanford Univ., Stanford, CA, USA
fYear
2011
fDate
14-16 June 2011
Firstpage
46
Lastpage
47
Abstract
We study the resistance switching mechanism of rutile TiO2 using ab initio calculations based on DFT. Ordering of the oxygen vacancies substantially increases the conductivity of TiO2 by forming a conductive channel, i.e. “ON”-state. We find that the diffusion of either oxygen or hydrogen atoms into the conductive channel causes the rupture of the conductive filament resulting in the transition from “ON”-state to “OFF”-state.
Keywords
discrete Fourier transforms; random-access storage; titanium compounds; DFT; ReRAM; TiO2-X; ab initio calculations; conductive channel; conductive filament; hydrogen impurities; resistance switching mechanism; Conductivity; Electrodes; Hydrogen; Ions; Resistance; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology (VLSIT), 2011 Symposium on
Conference_Location
Honolulu, HI
ISSN
0743-1562
Print_ISBN
978-1-4244-9949-6
Type
conf
Filename
5984625
Link To Document