Title : 
Strain-engineering for high-performance STT-MRAM
         
        
            Author : 
Iba, Y. ; Tsunoda, K. ; Lee, Y.M. ; Yoshida, C. ; Noshiro, H. ; Takahashi, A. ; Yamazaki, Y. ; Nakabayashi, M. ; Hatada, A. ; Aoki, M. ; Sugii, T.
         
        
            Author_Institution : 
Low-power Electron. Assoc. & Project ( LEAP ), Tsukuba, Japan
         
        
        
        
        
        
            Abstract : 
Strain-engineering using the inverse magnetostrictive effect has been performed to improve the performance of spin transfer torque magnetoresistance random access memory (STT-MRAM). The thermal stability factor E/kBT has been enhanced by 40% without increasing a switching current by controlling the process-induced stress in a free layer in MTJ (magnetic tunnel junctions) with mechanically engineered manufacturing steps.
         
        
            Keywords : 
MRAM devices; magnetic tunnelling; thermal stability; MTJ; high-performance STT-MRAM; inverse magnetostrictive effect; magnetic tunnel junctions; process-induced stress; spin transfer torque magnetoresistance random access memory; strain engineering; thermal stability factor; Films; Magnetic tunneling; Magnetostriction; Saturation magnetization; Stress; Switches;
         
        
        
        
            Conference_Titel : 
VLSI Technology (VLSIT), 2011 Symposium on
         
        
            Conference_Location : 
Honolulu, HI
         
        
        
            Print_ISBN : 
978-1-4244-9949-6