Design technology co-optimization in technology definition for 22nm and beyond

The successful scaling of CMOS technology through many generations has carried with it an implicit assumption that the most effective geometries for assembling circuits does not change significantly. As the ability to scale the physical dimensions becomes increasingly difficult in patterning and process, this assumption no longer leads to an optimal solution. This paper reviews a pragmatic process combining the design and technology development disciplines to optimize the technology definition, particularly in the critical levels design rules, as early in the definition process as possible.