Title :
A fully-integrated cantilever-based DNA detection SoC in a CMOS Bio-MEMS process
Author :
Huang, Yu-Jie ; Huang, Che-Wei ; Lin, Tsung-Hsien ; Lin, Chih-Ting ; Chen, Li-Guang ; Hsiao, Po-Yun ; Wu, Bi-Ru ; Hsueh, Hsiao-Ting ; Kuo, Bing-Jye ; Tsai, Hann-Huei ; Liao, Hsin-Hao ; Juang, Ying-Zong ; Wang, Chorng-Kuang ; Lu, Shey-Shi
Author_Institution :
Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
A highly-integrated DNA detection SoC, which includes DNA sensors, readout circuit, MCU, and OOK TX/RX, is implemented in a 0.35μm CMOS Bio-MEMS process. For low DNA concentration, an oscillator-based self-calibrated readout circuit with high sensitivity (2kHz/Ω) is proposed to convert small resistance variation of the piezoresistive cantilever sensor into adequate frequency shift. The measured results reveal that it could detect <;0.02% of resistance variation (0.6Ω) and cover detection concentration range of specific DNA from 100pM to 1μM.
Keywords :
CMOS integrated circuits; DNA; bioMEMS; biological techniques; cantilevers; electric sensing devices; molecular biophysics; piezoresistive devices; system-on-chip; CMOS BioMEMS process; DNA sensors; SoC; fully-integrated cantilever-based DNA detection; oscillator-based self-calibrated readout circuit; piezoresistive cantilever sensor; readout circuit; size 0.35 mum; Biosensors; CMOS integrated circuits; DNA; Frequency conversion; Sensitivity; System-on-a-chip;
Conference_Titel :
VLSI Circuits (VLSIC), 2011 Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-61284-175-5
