Input shaping based vibration reduction for the flexible bonding arm of a LED die bonder

The LED bonder is an important equipment of post-packaging of LED production process. It features high speed and high accuracy. The bonding arm of a die bonder is a flexible mechanism. There will be residual vibration when the bonding arm moves in high speed. According to the die bonding process and characteristics of the bonding arm, we discuss and verify the effect of different input shaping control algorithms. An input shaper is designed based on the optimal control theory. This leads to not only fast response, but also small residual vibration. Robustness of the input shapers is investigated when there is model parameter error. In order to better apply the input shaping technique, the algorithm is embedded in a driver developed for the voice coil motor. Experimental results show that input shaping can effectively reduce the residual vibration of the bonding arm.