DocumentCode
551312
Title
Structural analysis of nanometer-size pyramid grown on an end of tungsten blunt tip
Author
Nakagawa, Tatsuhiro ; Rokuta, E. ; Hashimoto, G. ; Murata, H. ; Shimoyama, H. ; Oshima, C.
Author_Institution
Fac. of Sci. & Eng., Meijo Univ. Nagoya, Nagoya, Japan
fYear
2011
fDate
18-22 July 2011
Firstpage
51
Lastpage
52
Abstract
We have fabricated nanometer-size pyramids (nanopyramids) on blunt W tips to apply for bright field emitter. The blunt tips were preliminarily given remolding treatment in order to sharpen their ends. The nanopyramids were grown on the tip end by being covered with thin layers of Pd and subsequently annealed at 1000 K. The structures of the specimen were analyzed by using filed ion microscopy (FIM). As a result, we have clarified detailed information about the atomic structures, of which the acquisition was not allowed in case that only FEM was employed. As far as the remolded W tips were concerned, the tip-end dimension of about 3 nm was narrowest possible for all the combinations of the remolding temperature and electric field. On the other hand, the grown nanopyramid with {211} sides and monoatomic-chain ridges exhibited even narrower summit. These findings are consistent with the contrasting behaviors of current stability data previously clarified by the FEM study.
Keywords
electric fields; field ion emission; nanoelectronics; tungsten; atomic structure; bright field emitter; electric field; filed ion microscopy; monoatomic-chain ridge; nanometer-size pyramid; nanopyramids; remolding treatment; structural analysis; tip-end dimension; tungsten blunt tip; Annealing; Atomic layer deposition; Electric fields; Finite element methods; Heating; Iron; Stability analysis; FIM; remolding treatment; single-atom emitter;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
Conference_Location
Wuppertal
ISSN
pending
Print_ISBN
978-1-4577-1243-2
Electronic_ISBN
pending
Type
conf
Filename
6004557
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